The lateral resolution of a scanning nonlinear dielectric microscope (SNDM) depends on the tip radius. The contact-type SNDM has problems associated with tip abrasion and tip deformation. Thus, the use of an electro-conductive carbon nanotube (CNT) probe tip is expected to lead to improvements in resolution and durability. In the present paper, we employ a contact-type SNDM with a CNT probe to measure the ferroelectric domain wall of stoichiometric lithium tantalate (LiTaO3), and similar SNDM measurements are performed with a platinum-coated probe for comparison. In addition, we observe the charge distribution accumulated in a floating gate (FG) type flash memory and the dopant profile of an n-channel metal-oxide-semiconductor field-effect transistor (MOSFET), respectively. By comparing the SNDM images obtained with the two probes, we demonstrate that the lateral resolution of the CNT probe is better than that of the conventional metal-coated probe.
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering