Fingerprint
Dive into the research topics of 'Residual stress in silicon substrate with shallow trenches on surface after local thermal oxidation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Residual stress in silicon substrate with shallow trenches on surface after local thermal oxidation
Hideo Miura, Naoto Saito, Hiroyuki Ohta, Noriaki Okamoto
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)