Research and development of microsystems

Hiroki Kuwano; Keiichi Yanagisawa; Hiroshi Hosaka; Kenji Fukuzawa

Research and development of microsystems

Hiroki Kuwano, Keiichi Yanagisawa, Hiroshi Hosaka, Kenji Fukuzawa

Research output: Contribution to journal › Article › peer-review

Abstract

We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.

Original language	English
Pages (from-to)	911-922
Number of pages	12
Journal	NTT R and D
Volume	45
Issue number	9
Publication status	Published - 1996 Dec 1
Externally published	Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering

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abstract = "We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.",

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