Abstract
We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 911-922 |
| Number of pages | 12 |
| Journal | NTT R and D |
| Volume | 45 |
| Issue number | 9 |
| Publication status | Published - 1996 Dec 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Fingerprint Dive into the research topics of 'Research and development of microsystems'. Together they form a unique fingerprint.
Cite this
Kuwano, H., Yanagisawa, K., Hosaka, H., & Fukuzawa, K. (1996). Research and development of microsystems. NTT R and D, 45(9), 911-922.