Abstract
We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 911-922 |
| Number of pages | 12 |
| Journal | NTT R and D |
| Volume | 45 |
| Issue number | 9 |
| Publication status | Published - 1996 Dec 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering