We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.
|Number of pages||12|
|Journal||NTT R and D|
|Publication status||Published - 1996 Dec 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering