Research and development of microsystems

Hiroki Kuwano, Keiichi Yanagisawa, Hiroshi Hosaka, Kenji Fukuzawa

Research output: Contribution to journalArticlepeer-review

Abstract

We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.

Original languageEnglish
Pages (from-to)911-922
Number of pages12
JournalNTT R and D
Volume45
Issue number9
Publication statusPublished - 1996 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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