Abstract
We describe our efforts at developing microsystems. Those will play an important role in sensor-communication systems. Designs, fabrications, and characteristics of microsystems such as micro fluidic devices for micro total analysis systems, ultra-high resolution scanning near-field optical microscopes, and micro-relay arrays, are discussed.
Original language | English |
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Pages (from-to) | 911-922 |
Number of pages | 12 |
Journal | NTT R and D |
Volume | 45 |
Issue number | 9 |
Publication status | Published - 1996 Dec 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering