Reproducible formation of nanoscale-gap electrodes for single-molecule measurements by combination of FIB deposition and tunneling current detection

K. Shigeto, M. Kawamura, A. Yu Kasumov, K. Tsukagoshi, K. Kono, Y. Aoyagi

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

We have reproducibly fabricated suspended tungsten electrodes with a gap of less than 2 nm on a suspended silicon nitride membrane with a slit. Our fabrication technique is based on the local deposition of tungsten by a focused ion beam. The length of the nanogap between the electrodes was controlled by detecting a tunneling current during the growth of the tungsten electrodes from both sides of the slit. The gap length can reach about 1 nm, which corresponds to the size of a single molecule such as a fullerene.

Original languageEnglish
Pages (from-to)1471-1473
Number of pages3
JournalMicroelectronic Engineering
Volume83
Issue number4-9 SPEC. ISS.
DOIs
Publication statusPublished - 2006 Apr

Keywords

  • Focused ion beam
  • Nanoelectrode
  • Single molecule
  • Tunneling current

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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