Replication of a sinusoidal grid surface by hot embossing and UV-casting

Naoya Tsurumi, Wei Gao, Akihide Kimura, Satoshi Kiyono

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Abstract

This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for measurement of planar motions. The profile of the gird surface is a superposition of sinusoidal waves in the X-direction and the Y-direction with spatial wavelengths of a hundred micrometers and amplitudes of a hundred nanometers. The master surface is fabricated on a diamond turning machine equipped with a fast tool servo. Two kinds of replication methods, the hot embossing and UV casting are employed for replicating the grid surface on polymer materials. The replication on a glass plate is also carried out by UV-casting. The replication systems and some experimental results are presented.

Original languageEnglish
Article number60520P
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6052
DOIs
Publication statusPublished - 2005 Dec 1
EventOptomechatronic Systems Control - Sappora, Japan
Duration: 2005 Dec 52005 Dec 7

Keywords

  • Glass
  • Hot embossing
  • Metrology surface
  • Polymer materials
  • Replication
  • UV-casting

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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