TY - JOUR
T1 - Relationship between optical dielectric constant and XPS relative chemical shift of 1s and 2p levels for dielectric compounds
AU - Hirose, K.
AU - Suzuki, H.
AU - Nohira, H.
AU - Ikenaga, E.
AU - Kobayashi, D.
AU - Hattori, T.
N1 - Funding Information:
The authors express sincere gratitude to K. Kobayashi and Y. Tamenori from JASRI/SPring-8, and Y. Takata and S. Shin from RIKEN/SPring-8 for their assistance in this study. This work was supported by the Ministry of Education, Culture, Sports, Science, and Technology through a Grant-in-aid (B) No. 18360026.
PY - 2008/3/1
Y1 - 2008/3/1
N2 - We find a new relationship between the optical dielectric constant of Al dielectric films and their chemical shifts measured by X-ray photoelectron spectroscopy (XPS). We measure the difference between core-level binding energy shift for Al 1s and core-level binding energy shift for Al 2p, ΔE 1s - ΔE2p, for AlN using high-resolution high-energy synchrotron radiation. We find that ΔE1s - ΔE 2p correlates well with the optical dielectric constants of Al, AlN, and Al2O3. This is consistent with the case of our previously reported Si compounds. First-principles calculations are performed to determine the mechanism behind the observed correlation.
AB - We find a new relationship between the optical dielectric constant of Al dielectric films and their chemical shifts measured by X-ray photoelectron spectroscopy (XPS). We measure the difference between core-level binding energy shift for Al 1s and core-level binding energy shift for Al 2p, ΔE 1s - ΔE2p, for AlN using high-resolution high-energy synchrotron radiation. We find that ΔE1s - ΔE 2p correlates well with the optical dielectric constants of Al, AlN, and Al2O3. This is consistent with the case of our previously reported Si compounds. First-principles calculations are performed to determine the mechanism behind the observed correlation.
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U2 - 10.1088/1742-6596/100/1/012011
DO - 10.1088/1742-6596/100/1/012011
M3 - Article
AN - SCOPUS:44649169177
VL - 100
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012011
ER -