Relationship between mechanical properties and micro texture of electroplated gold thin films

Yutaro Nakoshi, Ken Suzuki, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Once wide distribution and fluctuation of physical properties appear in the electroplated thin films, the local distribution of the residual stress and strain should become complicated and the large local residual stress and strain should cause not only random damage in the semiconductor devices and wiring materials but also electronic function shifts of semiconductor devices. Therefore, micro texture such as crystal orientation and crystallinity based on atomic arrangement of electroplated gold films were evaluated and the variation of mechanical properties were measured by using nano-indentation method. From these experiments, the relationship between mechanical properties and micro texture of electroplated gold thin films was investigated in detail. It was found that the crystallinity and grain size were related to the distribution of hardness of the films and softening and hardening, and the local crystallographic orientation was related to the distribution of Young's modulus of the films.

Original languageEnglish
Title of host publicationIMPACT 2017 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, Proceedings
PublisherIEEE Computer Society
Pages58-61
Number of pages4
ISBN (Electronic)9781538647196
DOIs
Publication statusPublished - 2017 Jul 1
Event12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017 - Taipei, Taiwan, Province of China
Duration: 2017 Oct 252017 Oct 27

Publication series

NameProceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
Volume2017-October
ISSN (Print)2150-5934
ISSN (Electronic)2150-5942

Other

Other12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017
CountryTaiwan, Province of China
CityTaipei
Period17/10/2517/10/27

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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