Relationship between impurity (B or P) and carrier concentration in SiGe(C) epitaxial film produced by thermal treatment

Jintae Noh, Shinobu Takehiro, Masao Sakuraba, Junichi Murota

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy