Reduction of moisture in semiconductor dry process equipment by generating extremely low oxygen ambience

Kazuhiko Endo, Naoki Shirakawa, Yoshiyuki Yoshida, Takeshi Iwase, Tetsuya Mino

Research output: Contribution to journalArticle

Abstract

The decomposition of moisture has been enhanced by reducing oxygen in process gases, and extremely low moisture gases have been successfully generated. An oxygen reduction system using a solid electrolyte has been used to reduce oxygen and enhance the decomposition of moisture. A marked increase in the evacuation speed of a process chamber has been successfully demonstrated when flushing with an extremely low moisture gas.

Original languageEnglish
Pages (from-to)08HH011-08HH012
JournalJapanese journal of applied physics
Volume48
Issue number8 Part 2
DOIs
Publication statusPublished - 2009 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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