Reduction of Micro valve Leakage based on Precise Measurement of Flow Conductance

Motohisa Hirano, Keiichi Yanagisawa, Hiroki Kuwano, Satoko Nakano

Research output: Contribution to journalArticle

Abstract

This paper reports a reduction of microvalve leakage according to precise measurements of the leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of a cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8 X 10-10 Pa m3/s and a flow rate ranging from 5.8 X 10-10 to 3.2 X 10-4 Pa.m3/s.

Original languageEnglish
Pages (from-to)622-626
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume117
Issue number12
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

Keywords

  • micromachine
  • microvalve

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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