The reduction of the energy dissipation induced by defects is essential to achieve the ultrahigh-quality-factor mechanical resonators for the applications of quantum platform and high-sensitivity microelectromechanical (MEMS) and nanoelectromechanical system (NEMS) sensors. Single-crystal diamond (SCD) is the ideal material for high-quality-factor mechanical resonators due to its outstanding mechanical properties and intrinsic low-energy dissipation. To achieve mechanical resonators with extreme properties as well as high reliability, it is desirable to develop all-SCD mechanical resonators. By using a smart-cut method and atomic layer etching to remove the defects within the resonators, we achieve the SCD-on-SCD mechanical resonators with ultrahigh quality factors of over one million at room temperature. The quality factors are one or more orders of magnitude higher than those of the state-of-The-Art MEMS cantilevers based on polycrystalline diamond, single-crystal silicon, and other crystal materials. The diamond MEMS resonators would be highly promising for sensor application as well as for the scheme for coupling with quantum centers in diamond.
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy (miscellaneous)