Reduced density of missing-dimer vacancies on tungsten-contaminated Si(100)-(2 × n) surface by hydrogen termination

Shinobu Matsuura, Taro Hitosugi, Seiji Heike, Ayumu Kida, Yuji Suwa, Toshiyuki Onogi, Satoshi Watanabe, Koichi Kitazawa, Tomihiro Hashizume

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Abstract

    A Si(100) surface with missing-dimer vacancies forming (2 × n) phase was prepared by tungsten deposition and the morphological change was observed by scanning tunneling microscopy when the surface was terminated by hydrogen. The density of dimer vacancies was significantly reduced by the hydrogen termination, suggesting that the density of subsurface W atoms decreased. We discuss the mechanism of this morphological change based on the traditional theory of chemisorption-induced surface segregation and on the energetic instability of W atoms buried in the subsurface of the hydrogen-terminated Si surface.

    Original languageEnglish
    Pages (from-to)4518-4520
    Number of pages3
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume39
    Issue number7 B
    Publication statusPublished - 2000 Dec 1

    Keywords

    • (2 × n) surface reconstruction
    • Hydrogen-terminated Si(100) surface
    • Missing-dimer vacancy
    • Scanning tunneling microscopy

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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