Recording on PZT and AgInSbTe thin films for probe-based data storage

Dong Weon Lee, Takahito Ono, Masayoshi Esashi

Research output: Contribution to conferencePaper

4 Citations (Scopus)

Abstract

In this paper, we propose microprobe-based electrical and thermal recording techniques for the application of high-density data storage. A microheater integrated at the free end of a thermal microprobe is formed by diffusion of boron for 3 hrs at 1160°C and it is supported by two contuctive silicon legs. When flowing a pulsed current through the legs, the heater is electrically heated up in a short time. Primary experiments for the electrical and thermal recording are evaluated using a sol-gel processed PZT and AgInSbTe thin films as a storage medium. For electrical recording on the PZT film, a voltage pulse is applied between a conductive tip and the PZT film. The nano-sized ferroelectric domains are easily switched by the applied voltage. The smallest marks were below 100 nm in diameter, which correspond to bit densities over 70 Gb/in2. For the thermal recording on the AgInSbTe, the conductive tip is Joule heated by flowing a current and then the heated tip makes a local phase change (amorphous to crystalline or amorphous to crystalline) of the AgInSbTe thin film. To read the formed mark, we measure an electrical resistance between a bottom electrode of AgInSbTe and the conductive tip because the electrical resistance of amorphous state is higher than that of the crystalline state.

Original languageEnglish
Pages685-688
Number of pages4
Publication statusPublished - 2002 Jan 1
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: 2002 Jan 202002 Jan 24

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period02/1/2002/1/24

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, D. W., Ono, T., & Esashi, M. (2002). Recording on PZT and AgInSbTe thin films for probe-based data storage. 685-688. Paper presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States.