Recent progresses of application-oriented MEMS through industry-university collaboration

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

Abstract

MEMS research has been carried out through industry-university (Tohoku) collaboration for practical applications. Sophisticated devices such as electrostatically levitated rotational gyroscope, MEMS relay for wafer level packaging, array MEMS including multi-probe data storage and multi-column electron beam lithography system, small diameter fiber optic pressure sensor and SiC micro structure for glass press molding, have been developed. Electrical feedthroughs in glass play important role in the wafer level packaging and array MEMS. Materials such as conductive polymer for recording media, carbon nanotube for electron field emitter, SiC for harsh environment are used in these MEMS because of their unique features.

Original languageEnglish
Pages (from-to)693-704
Number of pages12
JournalInternational Journal of High Speed Electronics and Systems
Volume16
Issue number2
DOIs
Publication statusPublished - 2006 Jun 1

Keywords

  • MEMS
  • Sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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