Recent developments in soft X-ray emission spectroscopy microscopy

M. Terauchi, T. Hatano, M. Koike, A. S. Pirozhkov, H. Sasai, T. Nagano, M. Takakura, T. Murano

    Research output: Contribution to journalConference articlepeer-review

    2 Citations (Scopus)


    This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.

    Original languageEnglish
    Article number012022
    JournalIOP Conference Series: Materials Science and Engineering
    Issue number1
    Publication statusPublished - 2020 Aug 5
    Event16th European Workshop on Modern Developments and Applications in Microbeam Analysis, EMAS 2019 - Trondheim, Norway
    Duration: 2019 May 192019 May 23

    ASJC Scopus subject areas

    • Materials Science(all)
    • Engineering(all)


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