Realization of Desirable Microstructure in Functional Magnetic Thin Films by Controlling the Impurities in Sputtering Process

Migaku Takahashi, Masakiyo Tsunoda, David D. Djayaprawira

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)631-638
Number of pages8
JournalShinku/Journal of the Vacuum Society of Japan
Volume44
Issue number7
DOIs
Publication statusPublished - 2001 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this