Real-time observation of film structure using X-ray waveguide phenomenon

Kouichi Hayashi, Wen Hu, Takahiro Nakamura, Hisataka Takenaka, Kosuke Suzuki, Masahisa Ito

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The X-ray waveguide phenomenon was applied for quick evaluation of film structure. By irradiating synchrotron radiation white X-rays on a Si/poly(methyl methacrylate) (PMMA)/Si multilayer, we observed the spectrum of the guided X-rays, which provides information on the thickness and density of the film, and followed its variation over time due to radiation damage induced by the strong white X-ray beam. The rapid PMMA layer compression, which occurring during the first 200 s after the irradiation, was sensitively monitored by the present method.

Original languageEnglish
Article number110207
JournalJapanese journal of applied physics
Volume48
Issue number11
DOIs
Publication statusPublished - 2009 Dec 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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