The X-ray waveguide phenomenon was applied for quick evaluation of film structure. By irradiating synchrotron radiation white X-rays on a Si/poly(methyl methacrylate) (PMMA)/Si multilayer, we observed the spectrum of the guided X-rays, which provides information on the thickness and density of the film, and followed its variation over time due to radiation damage induced by the strong white X-ray beam. The rapid PMMA layer compression, which occurring during the first 200 s after the irradiation, was sensitively monitored by the present method.
ASJC Scopus subject areas
- Physics and Astronomy(all)