Real-time monitoring of the Si carbonization process by a combined method of reflection high-energy electron diffraction and Auger electron spectroscopy

Ryoji Kosugi, Yuji Takakuwa, Ki Seon Kim, Tadashi Abukawa, Shozo Kono

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Real-time monitoring of the Si carbonization process by a combined method of reflection high-energy electron diffraction and Auger electron spectroscopy'. Together they form a unique fingerprint.

Physics & Astronomy