Reaction mechanism of ZrO x metal resists with extreme ultraviolet irradiation

Yoshiyuki Yamashita, Toyohiro Chikyow, Julius Joseph Santillan, Toshiro Itani

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1 Citation (Scopus)

Abstract

The reaction mechanism of ZrO-based metal resists by extreme ultraviolet (EUV) exposure was investigated using hard X-ray photoelectron spectroscopy, near edge X-ray absorption fine structure spectroscopy, and X-ray diffraction. EUV exposure did not affect the amorphous structure of the metal resist. After EUV exposure, the π∗ states of the C atom and the σ∗ states of the O atom of the cell molecules were reacted. Moreover, EUV exposure decomposed the carbonyl species of the cell molecules and forms the high oxidation states of ZrO x . Thus, the metal resist reaction occurred with the decomposition of cell molecules and the formation of ZrO2 by EUV exposure.

Original languageEnglish
Article numberSDDC01
JournalJapanese journal of applied physics
Volume58
Issue numberSD
DOIs
Publication statusPublished - 2019 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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