Reaction field analysis of a non-thermal plasma flowing in a rectangular reactor

Takehiko Sato, Dai Ito, Hideya Nishiyama

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Chemical reactive fields of non-thermal plasma flowing were clarified by using both experimental and numerical methods in the present study. The plasma was generated by using needle-plate electrodes with applied voltage of 12 kV and a square wave of 20 Hz. The operating gas was air injected at a rate of 1-10 Sl/min through a rectangular reactor with a 3×7 mm cross section. Distributions of gas velocity, gas temperature and NO concentration were clarified by experimental and numerical methods. The NO concentration was strongly influenced by the gas flow rate, because the N concentration was rapidly decreased in the case of small gas flow rate.

Original languageEnglish
Pages (from-to)78-83
Number of pages6
JournalThin Solid Films
Volume457
Issue number1
DOIs
Publication statusPublished - 2004 Jun 1
Event16th Symposium on Plasma Science for Materials (SPSM-16) - Tokyo, Japan
Duration: 2003 Jun 42003 Jun 5

Keywords

  • Glow discharge
  • Nitrogen dioxide
  • Oxygen
  • Reaction kinetics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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