Rapidly calculation method of radiative heat transfer analysis by reducing element number and application of lamp heaters

Shigeki Hirasawa, Shigenao Maruyama

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

It is important to shorten the computation time of radiative heat transfer when doing a conjugate numerical heat transfer analysis. The relation between the computation time and the total number of surface elements is shown for an analysis of radiative heat transfer. A method that shorten the computation time by reducing element number has been developed. The method merges elements of low radiative heat flux using the results of a rough calculation. It seems promising for reducing the computation time without increasing errors. The distribution of radiative heat flux on a wafer in a lamp heating apparatus was calculated using the method. The results show that the distribution of the heat flux can be reduced by using a diffusive reflector.

Original languageEnglish
Pages (from-to)1249-1253
Number of pages5
JournalNihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B
Volume66
Issue number644
DOIs
Publication statusPublished - 2000 Apr

Keywords

  • Furnace
  • Numerical analysis
  • Shape factor
  • Thermal radiation
  • Wafer

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering

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