Rapid synthesis of yttria-stabilized zirconia films by laser chemical vapor deposition

Teiichi Kimura, Takashi Goto

Research output: Contribution to journalArticlepeer-review

39 Citations (Scopus)

Abstract

Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/h) by laser chemical vapor deposition (laser CVD) using Zr(dpm)4 precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.

Original languageEnglish
Pages (from-to)421-424
Number of pages4
JournalMaterials Transactions
Volume44
Issue number3
DOIs
Publication statusPublished - 2003 Mar

Keywords

  • High deposition rate
  • Laser chemical vapor deposition
  • Thermal barrier coatings
  • Yttria stabilized zirconia

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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