Abstract
Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/h) by laser chemical vapor deposition (laser CVD) using Zr(dpm)4 precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.
| Original language | English |
|---|---|
| Pages (from-to) | 421-424 |
| Number of pages | 4 |
| Journal | Materials Transactions |
| Volume | 44 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2003 Mar |
Keywords
- High deposition rate
- Laser chemical vapor deposition
- Thermal barrier coatings
- Yttria stabilized zirconia
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering