Rapid synthesis of yttria-stabilized zirconia films by laser chemical vapor deposition

Teiichi Kimura; Takashi Goto

doi:10.2320/matertrans.44.421

Rapid synthesis of yttria-stabilized zirconia films by laser chemical vapor deposition

Teiichi Kimura, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

39 Citations (Scopus)

Abstract

Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/h) by laser chemical vapor deposition (laser CVD) using Zr(dpm)₄ precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.

Original language	English
Pages (from-to)	421-424
Number of pages	4
Journal	Materials Transactions
Volume	44
Issue number	3
DOIs	https://doi.org/10.2320/matertrans.44.421
Publication status	Published - 2003 Mar

Keywords

High deposition rate
Laser chemical vapor deposition
Thermal barrier coatings
Yttria stabilized zirconia

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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abstract = "Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/h) by laser chemical vapor deposition (laser CVD) using Zr(dpm)4 precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.",

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