Rapid synthesis and scanning probe analysis of BaxSr1-xTiO3 composition spread films on a temperature gradient Si(100) substrate

Hideki Minami, Kenji Itaka, Parhat Ahmet, Daisuke Komiyama, Toyohiro Chikyow, Mikk Lippmaa, Hideomi Koinuma

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20 Citations (Scopus)


We have succeeded in rapid optimization of dielectric properties in a combinatorial BaxSr1-xTiO3 film library fabricated on a highly insulating Si substrate. The thin-film library was prepared by using a pulsed-laser molecular beam epitaxy system equipped with a combinatorial mask for controlling compositional (i.e. x in BaxSr1-xTiO3) variations and a temperature-gradient sample holder for obtaining a growth temperature variation along the x and y axis of the substrate, respectively. The dielectric properties of this combinatorial library were mapped by a scanning evanescent microwave probe at a frequency of 2.5 GHz, revealing a strong dependence of permittivity and loss on the composition and on the growth temperature. The optimum permittivity was found in the film with x ∼ 0.5 grown at 730°C. From X-ray diffraction analysis, strong correlation was found between the grain orientations and dielectric properties.

Original languageEnglish
Pages (from-to)L149-L151
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number2 A
Publication statusPublished - 2002 Feb 1
Externally publishedYes


  • Combinatorial approach
  • Composition-spread
  • Rapid dielectric characterization
  • Temperature-gradiant

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)


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