The authors discuss what they believe is the first demonstration of the interconnection correction of common structure LSIs. In particular, the feasibility of rapid maskless LSI circuit interconnection with laser processing has been demonstrated and verified on LSI chips with a widely adopted multilayered interconnection structure. This laser processing circuit correction scheme is expected to facilitate LSI circuit development.
|Title of host publication||Unknown Host Publication Title|
|Publisher||Optical Soc of America|
|Number of pages||3|
|Publication status||Published - 1987|
ASJC Scopus subject areas