RAPID MASKLESS CORRECTION OF AN LSI INTERCONNECTION UTILIZING NEWLY DEVELOPED LASER PROCESSING.

Shunji Kishida, Yukio Morishige, Fumihiko Uesugi, Hiroyuki Yokoyama, Takayuki Mizuta, Shinji Masuda, Kazunari Matsumoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The authors discuss what they believe is the first demonstration of the interconnection correction of common structure LSIs. In particular, the feasibility of rapid maskless LSI circuit interconnection with laser processing has been demonstrated and verified on LSI chips with a widely adopted multilayered interconnection structure. This laser processing circuit correction scheme is expected to facilitate LSI circuit development.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherOptical Soc of America
Pages282-284
Number of pages3
ISBN (Print)0936659491
Publication statusPublished - 1987
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Kishida, S., Morishige, Y., Uesugi, F., Yokoyama, H., Mizuta, T., Masuda, S., & Matsumoto, K. (1987). RAPID MASKLESS CORRECTION OF AN LSI INTERCONNECTION UTILIZING NEWLY DEVELOPED LASER PROCESSING. In Unknown Host Publication Title (pp. 282-284). Optical Soc of America.