Rapid deposition of YBCO films by laser CVD and effect of lattice mismatch on their epitaxial growth and critical temperature

Pei Zhao, Akihiko Ito, Takashi Goto

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

a-Axis- and c-axis-oriented YBa2Cu3O 7-δ (YBCO) films were grown on (100) SrTiO3 substrate by laser chemical vapour deposition (laser CVD). The effect of lattice mismatch between films and substrates on in-plane and out-of-plane crystallinity and critical temperature (TC) was investigated. The preferred orientation changed from a-axis to c-axis as the deposition temperature increased from 928 to 1049 K. The c-axis-oriented YBCO showed a minimum of full width at half maximum of 0.5 for the ω-scan and 1.0 for the φ-scan. A smaller mismatch between YBCO films and substrates led a higher crystallinity for in-plane and out-of-plane epitaxial growths. A high TC of 90 K was obtained for the c-axis-oriented YBCO films. The deposition rate of the YBCO films was 58-101 μm h-1, approximately 60-1000 times higher than that of conventional CVD.

Original languageEnglish
Pages (from-to)7491-7497
Number of pages7
JournalCeramics International
Volume39
Issue number7
DOIs
Publication statusPublished - 2013 Sep 1

Keywords

  • Critical temperature
  • Epitaxial growth
  • Laser chemical vapour deposition
  • YBaCuO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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