Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation

Zhan Jie Wang, Yuka Otsuka, Ziping Cao, Noboru Yoshikawa, Hiroyuki Kokawa

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Pb(Zr 0.32 Ti 0.48 )O 3 (PZT) thin films were coated onto Pt/Ti/SiO 2 /Si substrates by a sol-gel method and then crystallized by 2.45 GHz microwave irradiation in a magnetic field. The crystalline phases and microstructures as well as the electrical properties of the microwave-irradiated PZT films were investigated as a function of the elevated temperature generated by microwave irradiation. The perovskite PZT thin films with good electrical properties could be obtained by microwave irradiation at 650°C for 60 s. The average values of the remanent polarization and the coercive field of the PZT films were approximately 27 μC/cm 2 and 95 kV/cm, respectively, whereas the dielectric constant and loss value measured at 1 kHz were approximately 1100 and 0.18, respectively. It is clear that microwave irradiation is effective for obtaining well-crystallized PZT films with good properties in a short process time.

Original languageEnglish
Pages (from-to)7519-7522
Number of pages4
JournalJapanese journal of applied physics
Volume47
Issue number9 PART 2
DOIs
Publication statusPublished - 2008 Sep 19

Keywords

  • Electrical properties
  • Lead zirconate titanate (PZT)
  • Microstructure
  • Microwave irradiation
  • Sol-gel

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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