Rapid chemical vapour-deposition of Si3N4

Toshio Hirai, Koichi Niihara, Takashi Goto

Research output: Contribution to journalLetterpeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)631-632
Number of pages2
JournalJournal of Materials Science
Issue number3
Publication statusPublished - 1977 Mar 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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