Rapid and nondestructive evaluations of conductivity by spectroscopic measurements at plasma edge

Teppei Onuki, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report our evaluation of metallic material electric conductivity in terms of spectroscopic reflectometry at plasma edges for examining rapid and nondestructive micro components in microsystem. Conductivity (i.e., the mean free time of conduction electron) estimations were obtained through spectral measurements and fitting operations conducted with a theoretical model using copper and silver metal films. The validity of the Drude-Lorentz hybrid model and that of set parameters were confirmed and the mean free time was estimated by fitting with the peak height and the wavelength in the differential reflection spectrum as criteria. Significant differences in extracted conductivity values obtained through the process conditions (e.g., crystalline deficiency density and the existence of impurities) were recognized.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages413-416
Number of pages4
DOIs
Publication statusPublished - 2010 Nov 29
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 2010 Jan 202010 Jan 23

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/TerritoryChina
CityXiamen
Period10/1/2010/1/23

Keywords

  • Conductivity
  • Plasma edge
  • Reflectometry

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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