Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs

K. Abe, S. Sugawa, S. Watabe, N. Miyamoto, A. Teramoto, Y. Kamata, K. Shibusawa, M. Toita, T. Ohmi

Research output: Contribution to journalConference articlepeer-review

42 Citations (Scopus)

Abstract

In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (106 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.

Original languageEnglish
Article number4339696
Pages (from-to)210-211
Number of pages2
JournalDigest of Technical Papers - Symposium on VLSI Technology
DOIs
Publication statusPublished - 2007
Event2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan
Duration: 2007 Jun 122007 Jun 14

Keywords

  • RTS
  • TEG and characteristic fluctuation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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