R&D status of SOI-based pixel detector with 3D stacking readout

Toru Tsuboyama, Shun Ono, Miho Yamada, Yasuo Arai, Manabu Togawa, Ikuo Kurachi, Yoichi Ikegami, Kazuhiko Hara, Akimasa Ishikawa, Masayuki Ikebe, Makoto Motoyoshi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


SOFIST4 is an SOI pixel sensor designed for the International Linear Collider (ILC) vertex detector. In order to satisfy the requirements of the ILC vertex detector, the chip consists of three-stage hit-charge and hit-time memories in each 20μm×20μm pixel with 3D integration technology. The SOFIST4 chip was submitted for an MPW run in 2017, and 3D integration will be performed in 2018. In this article, the design of the SOFIST4 chip is first described. Then the 3D integration and 3D CAD technology are explained.

Original languageEnglish
Pages (from-to)422-425
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Publication statusPublished - 2019 Apr 21


  • 3D stacking
  • SOI CMOS pixel sensor

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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