Radio frequency magnetic near field measurements of coplanar waveguide simulated power and ground lines in radio frequency integrated circuits using a MFM tip

Yasushi Endo, Masaaki Fukushima, Kaoru Arai, Yutaka Shimada, Masahiro Yamaguchi

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

This paper describes our study on high-resolution measurements of the distribution of the radio frequency (RF) magnetic near field from a coplanar waveguide (CPW) with a size similar to power and ground lines in radio frequency integrated circuit chips using a magnetic force microscope tip and amplitude modulation of the line current. Cantilever resonance frequency modulation of approximately 25 kHz supplies the CPW with current and carrier frequencies up to 0.1 GHz. The CPW has a signal line width of 3 μm and a ground line width of 50 μm. The oscillation amplitudes of the tip with and without a DC magnetic field indicates that the distribution of the RF magnetic near field in the proximity of the CPW can be observed for a carrier frequency up to 0.1 GHz. This result also suggests that this method has potential as a new technique for high-resolution RF field measurements.

Original languageEnglish
Article number6332711
Pages (from-to)3666-3669
Number of pages4
JournalIEEE Transactions on Magnetics
Volume48
Issue number11
DOIs
Publication statusPublished - 2012

Keywords

  • Amplitude modulation
  • RF magnetic near field
  • coplanar waveguide (CPW)
  • magnetic force microscope (MFM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Radio frequency magnetic near field measurements of coplanar waveguide simulated power and ground lines in radio frequency integrated circuits using a MFM tip'. Together they form a unique fingerprint.

Cite this