Radial characterization of the electron energy distribution in a helicon source terminated by a double layer

Kazunori Takahashi, Christine Charles, Rod Boswell, Rikizo Hatakeyama

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

Electron energy probability functions (EEPFs) are measured across the radius (0≤r<6.85 cm) of a low pressure (0.3 mTorr) helicon plasma source terminated by a current-free double layer. The source field of about 130 G is generated using a Helmholtz coil pair and the radio frequency (rf) power is maintained at 250 W. All EEPFs exhibit a distribution with a temperature Te bulk out to a break energy εbreak and a relatively depleted distribution for higher energies with a lower temperature T#1e tail#2. T#1e bulk#2 and T#1e tail#2 are about 8 eV and 5 eV, respectively, for r<4 cm and increase up to about 14 eV and 9 eV near the source wall, i.e., near the rf antenna. ε#1break#2 is found to correspond to the potential drop of the double layer for the central part of the source and to the sheath potential near the wall.

Original languageEnglish
Article number074505
JournalPhysics of Plasmas
Volume15
Issue number7
DOIs
Publication statusPublished - 2008

ASJC Scopus subject areas

  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Radial characterization of the electron energy distribution in a helicon source terminated by a double layer'. Together they form a unique fingerprint.

Cite this