Questionnaire survey on ultra-precision positioning

T. Oiwa, M. Katsuki, M. Karita, W. Gao, S. Makinouchi, K. Sato, Y. Oohashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Questionnaire surveys on the ultra-precision positioning have been held seven times every four years since 1986. This paper presents the results of the surveys. According to the questionnaires, the following results were obtained. Averaged recognition levels of "precision" and "ultra-precision" are approximately 1 μm and 10 nm, respectively. Although the positioning accuracy is currently at the limit of development, the accuracy of less than 1 nm is expected in the future. Because the demand for higher speed and acceleration, as well as a longer stroke is increasing year by year, the linear motor drive is getting more popular. Performance of displacement sensors has been considerably improved. In particular, a linear scale unit is most often adopted for practical reasons. Because a concern has recently arisen regarding environmental issues, the replacement of hydraulic actuators with electromagnetic actuators, sparing the use of lubricating oil, is becoming more common.

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
EditorsP. Shore, Henny Spaan, H. Van Brussel, Theresa Burke
Publishereuspen
Pages463-466
Number of pages4
ISBN (Electronic)9780955308291
Publication statusPublished - 2011 Jan 1
Event11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 - Como, Italy
Duration: 2011 May 232011 May 26

Publication series

NameProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Volume2

Other

Other11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
CountryItaly
CityComo
Period11/5/2311/5/26

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Materials Science(all)
  • Instrumentation
  • Environmental Engineering

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