Quartz-crystal cantilevered resonator for nanometric sensing

Ikusei Rin, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A thin rectangle cantilevered resonator of AT-cut quartz crystal has been developed for force and nanometric sensing. The cantilevers with thicknesses of 15-27 μm were fabricated by deep reactive ion etching (deep-RIE). Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. Shear vibration in the direction of the electrical axis can be piezoelectrically exited and detected. Also flexural and torsional vibrations can be exited and piezoelectrically detected despite of the weak electromechanical coupling. Using flexural and torsional modes, scanning probe microscopy for topographic imaging is demonstrated.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages247-251
Number of pages5
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • AT-cut quartz crystal
  • Force sensor
  • Quartz crystal resonator
  • Scanning probe microscopy

ASJC Scopus subject areas

  • Engineering(all)

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