Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching

Seiji Samukawa

doi:10.1109/ICSICT.2012.6467698

Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching

Seiji Samukawa

Innovative Energy Research Center

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Silicon (Si) quantum dot (QD) superlattice structures are promising candidates for all-Silicon tandem solar cells. An original top-down process involving a bio-template etching mask and damage-free neutral beam etching has been developed in order to fabricate a sub-10-nm highly ordered and dense two-dimensional (2D) array (one layer) of Si nanodisks (Si-ND) with a silicon carbide (SiC) interlayer. The Si-ND 2D array with SiC interlayer had an extremely high optical absorption coefficient and high carrier transport due to the formation of a wide miniband. As a result, high efficiency solar cells with an open-circuit voltage of 0.556 V, short-circuit current of 31.3 mA/cm ², fill factor of 72%, and conversion efficiency of 12.6% were fabricated for the first time.

Original language	English
Title of host publication	ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
DOIs	https://doi.org/10.1109/ICSICT.2012.6467698
Publication status	Published - 2012
Event	2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2012 - Xi'an, China Duration: 2012 Oct 29 → 2012 Nov 1

Publication series

Name	ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Other

Other	2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2012
Country	China
City	Xi'an
Period	12/10/29 → 12/11/1

ASJC Scopus subject areas

Human-Computer Interaction
Electrical and Electronic Engineering

Access to Document

10.1109/ICSICT.2012.6467698

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Samukawa, S. (2012). Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching. In ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings [6467698] (ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). https://doi.org/10.1109/ICSICT.2012.6467698

Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching. / Samukawa, Seiji.

ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. 2012. 6467698 (ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Samukawa, S 2012, Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching. in ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings., 6467698, ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings, 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2012, Xi'an, China, 12/10/29. https://doi.org/10.1109/ICSICT.2012.6467698

Samukawa S. Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching. In ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. 2012. 6467698. (ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). https://doi.org/10.1109/ICSICT.2012.6467698

Samukawa, Seiji. / Quantum dot superlattice structure for high efficiency solar cells utilizing a bio-template and damage-free neutral beam etching. ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. 2012. (ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

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abstract = "Silicon (Si) quantum dot (QD) superlattice structures are promising candidates for all-Silicon tandem solar cells. An original top-down process involving a bio-template etching mask and damage-free neutral beam etching has been developed in order to fabricate a sub-10-nm highly ordered and dense two-dimensional (2D) array (one layer) of Si nanodisks (Si-ND) with a silicon carbide (SiC) interlayer. The Si-ND 2D array with SiC interlayer had an extremely high optical absorption coefficient and high carrier transport due to the formation of a wide miniband. As a result, high efficiency solar cells with an open-circuit voltage of 0.556 V, short-circuit current of 31.3 mA/cm 2, fill factor of 72%, and conversion efficiency of 12.6% were fabricated for the first time.",

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