Quantum chemical molecular dynamics studies on the chemical mechanical polishing process of Cu surface

Toshiyuki Yokosuka, Katsumi Sasata, Hitoshi Kurokawa, Seiichi Takami, Momoji Kubo, Akira Imamura, Akira Miyamoto

Research output: Contribution to journalArticle

18 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy