Quantitative measurement of submicrometre electrical conductivity

Bing Feng Ju, Yang Ju, Masumi Saka

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Electrical conductivity of a 99.999% aluminium wire with a 400 nm width and a 350 nm thickness was measured using the four-point atomic force microscope (AFM) technique. This technique is a combination of the principles of the four-point probe method and standard AFM. The equipment is capable of simultaneously measuring both surface topography and local electrical conductivity. Experiments show the microprobe to be mechanically flexible and robust. The repeatability of conductivity measurements indicates that this four-point AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.

Original languageEnglish
Pages (from-to)7467-7470
Number of pages4
JournalJournal of Physics D: Applied Physics
Volume40
Issue number23
DOIs
Publication statusPublished - 2007 Dec 7

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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