Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy

Kotaro Hirose, Katsuto Tanahashi, Hidetaka Takato, Yasuo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The carrier distribution in solar cell is important evaluation target. Scanning nonlinear dielectric microscopy is applied to the cross section of phosphorus implanted emitter in monocrystalline silicon solar cell and visualizes the carrier distribution quantitatively. The effective diffusivities of phosphorus are estimated from the experimental results. Then, the three-dimensional carrier distribution is simulated. The experimental and simulation results show good correlation.

Original languageEnglish
Title of host publicationIPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781538649299
DOIs
Publication statusPublished - 2018 Aug 30
Event25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018 - Singapore, Singapore
Duration: 2018 Jul 162018 Jul 19

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
Volume2018-July

Other

Other25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018
CountrySingapore
CitySingapore
Period18/7/1618/7/19

Keywords

  • Active dopant distribution
  • Effective diffusivity
  • Phosphorus-implanted emitter
  • Scanning nonlinear dielectric microscopy
  • Silicon solar cell

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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