Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition

M. Sumiya; S. Fuke; A. Tsukazaki; K. Tamura; A. Ohtomo; M. Kawasaki; H. Koinuma

doi:10.1063/1.1542938

Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition

M. Sumiya, S. Fuke, A. Tsukazaki, K. Tamura, A. Ohtomo, M. Kawasaki, H. Koinuma

Materials Property Division

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

The heterovalent impurities in ZnO thin films, prepared by pulsed laser deposition were analyzed using secondary ion mass spectroscopy (SIMS). It was found that alternative ablation was effective not only for achieving systematic control of Ga concentration but also for minimizing the contamination of undesired impurities. The composition spread sample included a region with the correct concentration ratio.

Original language	English
Pages (from-to)	2562-2569
Number of pages	8
Journal	Journal of Applied Physics
Volume	93
Issue number	5
DOIs	https://doi.org/10.1063/1.1542938
Publication status	Published - 2003 Mar 1

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.1542938

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@article{c7ffb7d17ba84c9abec72c5325d86148,

title = "Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition",

abstract = "The heterovalent impurities in ZnO thin films, prepared by pulsed laser deposition were analyzed using secondary ion mass spectroscopy (SIMS). It was found that alternative ablation was effective not only for achieving systematic control of Ga concentration but also for minimizing the contamination of undesired impurities. The composition spread sample included a region with the correct concentration ratio.",

author = "M. Sumiya and S. Fuke and A. Tsukazaki and K. Tamura and A. Ohtomo and M. Kawasaki and H. Koinuma",

year = "2003",

month = mar,

day = "1",

doi = "10.1063/1.1542938",

language = "English",

volume = "93",

pages = "2562--2569",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "5",

}

TY - JOUR

T1 - Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition

AU - Sumiya, M.

AU - Fuke, S.

AU - Tsukazaki, A.

AU - Tamura, K.

AU - Ohtomo, A.

AU - Kawasaki, M.

AU - Koinuma, H.

PY - 2003/3/1

Y1 - 2003/3/1

N2 - The heterovalent impurities in ZnO thin films, prepared by pulsed laser deposition were analyzed using secondary ion mass spectroscopy (SIMS). It was found that alternative ablation was effective not only for achieving systematic control of Ga concentration but also for minimizing the contamination of undesired impurities. The composition spread sample included a region with the correct concentration ratio.

AB - The heterovalent impurities in ZnO thin films, prepared by pulsed laser deposition were analyzed using secondary ion mass spectroscopy (SIMS). It was found that alternative ablation was effective not only for achieving systematic control of Ga concentration but also for minimizing the contamination of undesired impurities. The composition spread sample included a region with the correct concentration ratio.

UR - http://www.scopus.com/inward/record.url?scp=0037349792&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037349792&partnerID=8YFLogxK

U2 - 10.1063/1.1542938

DO - 10.1063/1.1542938

M3 - Article

AN - SCOPUS:0037349792

VL - 93

SP - 2562

EP - 2569

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 5

ER -

Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition

Abstract

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