Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition

M. Sumiya, S. Fuke, A. Tsukazaki, K. Tamura, A. Ohtomo, M. Kawasaki, H. Koinuma

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)

Abstract

The heterovalent impurities in ZnO thin films, prepared by pulsed laser deposition were analyzed using secondary ion mass spectroscopy (SIMS). It was found that alternative ablation was effective not only for achieving systematic control of Ga concentration but also for minimizing the contamination of undesired impurities. The composition spread sample included a region with the correct concentration ratio.

Original languageEnglish
Pages (from-to)2562-2569
Number of pages8
JournalJournal of Applied Physics
Volume93
Issue number5
DOIs
Publication statusPublished - 2003 Mar 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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