Quantitative analysis of hydrogen in SiO2/SiN/SiO2 stacks using atom probe tomography

Yorinobu Kunimune, Yasuhiro Shimada, Yusuke Sakurai, Masao Inoue, Akio Nishida, Bin Han, Yuan Tu, Hisashi Takamizawa, Yasuo Shimizu, Koji Inoue, Fumiko Yano, Yasuyoshi Nagai, Toshiharu Katayama, Takashi Ide

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Physics & Astronomy