Quantification in high-resolution electron microscopy with the imaging plate

By making good use of the excellent properties of the imaging plate (IP), i.e., high sensitivity, a wide dynamic range and good linearity for electron intensity, high-resolution electron microscope (HREM) images were quantitatively analyzed. In W₈Ta₂O₂₉, contrast changes due to the dynamical diffraction effect were quantitatively evaluated and compared with the simulated images. In Pb(Ba, Sr)₂(Eu, Ce)₂Cu₃O_y, which is related to high-T_c superconductors, atomic columns containing heavy elements such as Pb were clearly distinguished from those of relatively light elements such as Cu. Furthermore, quantitatively evaluated contour maps revealed vacant oxygen positions, which are important in characterization of both the structure and the electrical properties of the high-T_c superconductors. These results demonstrate that the IP is effective and indispensable for the quantitative analysis of HREM images as well as for electron diffraction patterns.