TY - GEN
T1 - Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator
AU - Hamza, Abdelli
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). MJK (MEXT No.160187) would like to acknowledge the Japanese Ministry of Education, Science, Sports and Culture (MEXT).
Publisher Copyright:
© 2020 IEEE.
PY - 2020/3
Y1 - 2020/3
N2 - We report a new method to control the quality factor (Q-factor) mismatch in a MEMS disk resonator using the effect of thermoelastic dissipation (TED). The heat conduction path was trimmed to control the thermal time constant, eventually Qfactor determined by TED. The heat conduction beams with small mechanical stiffness were placed in between large temperature difference areas. The Q-factors of two orthogonal modes could be independently controlled with little effect on the resonance frequency. By the proposed method, Q-factor could be trimmed as high as 38%, while the frequency change was only 0.5%.
AB - We report a new method to control the quality factor (Q-factor) mismatch in a MEMS disk resonator using the effect of thermoelastic dissipation (TED). The heat conduction path was trimmed to control the thermal time constant, eventually Qfactor determined by TED. The heat conduction beams with small mechanical stiffness were placed in between large temperature difference areas. The Q-factors of two orthogonal modes could be independently controlled with little effect on the resonance frequency. By the proposed method, Q-factor could be trimmed as high as 38%, while the frequency change was only 0.5%.
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U2 - 10.1109/INERTIAL48129.2020.9090082
DO - 10.1109/INERTIAL48129.2020.9090082
M3 - Conference contribution
AN - SCOPUS:85085468525
T3 - INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
Y2 - 23 March 2020 through 26 March 2020
ER -