Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We report a new method to control the quality factor (Q-factor) mismatch in a MEMS disk resonator using the effect of thermoelastic dissipation (TED). The heat conduction path was trimmed to control the thermal time constant, eventually Qfactor determined by TED. The heat conduction beams with small mechanical stiffness were placed in between large temperature difference areas. The Q-factors of two orthogonal modes could be independently controlled with little effect on the resonance frequency. By the proposed method, Q-factor could be trimmed as high as 38%, while the frequency change was only 0.5%.

Original languageEnglish
Title of host publicationINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728129839
DOIs
Publication statusPublished - 2020 Mar
Event7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 - Hiroshima, Japan
Duration: 2020 Mar 232020 Mar 26

Publication series

NameINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
CountryJapan
CityHiroshima
Period20/3/2320/3/26

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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