Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator

Abdelli Hamza; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1109/INERTIAL48129.2020.9090082

Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator

Abdelli Hamza, Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We report a new method to control the quality factor (Q-factor) mismatch in a MEMS disk resonator using the effect of thermoelastic dissipation (TED). The heat conduction path was trimmed to control the thermal time constant, eventually Qfactor determined by TED. The heat conduction beams with small mechanical stiffness were placed in between large temperature difference areas. The Q-factors of two orthogonal modes could be independently controlled with little effect on the resonance frequency. By the proposed method, Q-factor could be trimmed as high as 38%, while the frequency change was only 0.5%.

Original language	English
Title of host publication	INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728129839
DOIs	https://doi.org/10.1109/INERTIAL48129.2020.9090082
Publication status	Published - 2020 Mar
Event	7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 - Hiroshima, Japan Duration: 2020 Mar 23 → 2020 Mar 26

Publication series

Name	INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference	7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
Country	Japan
City	Hiroshima
Period	20/3/23 → 20/3/26

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Safety, Risk, Reliability and Quality
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/INERTIAL48129.2020.9090082

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Hamza, A., Tsukamoto, T., & Tanaka, S. (2020). Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator. In INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings [9090082] (INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INERTIAL48129.2020.9090082

Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator. / Hamza, Abdelli; Tsukamoto, Takashiro ; Tanaka, Shuji.

INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9090082 (INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hamza, A, Tsukamoto, T & Tanaka, S 2020, Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator. in INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings., 9090082, INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings, Institute of Electrical and Electronics Engineers Inc., 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020, Hiroshima, Japan, 20/3/23. https://doi.org/10.1109/INERTIAL48129.2020.9090082

Hamza A, Tsukamoto T , Tanaka S. Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator. In INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2020. 9090082. (INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). https://doi.org/10.1109/INERTIAL48129.2020.9090082

Hamza, Abdelli ; Tsukamoto, Takashiro ; Tanaka, Shuji. / Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator. INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. (INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

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abstract = "We report a new method to control the quality factor (Q-factor) mismatch in a MEMS disk resonator using the effect of thermoelastic dissipation (TED). The heat conduction path was trimmed to control the thermal time constant, eventually Qfactor determined by TED. The heat conduction beams with small mechanical stiffness were placed in between large temperature difference areas. The Q-factors of two orthogonal modes could be independently controlled with little effect on the resonance frequency. By the proposed method, Q-factor could be trimmed as high as 38%, while the frequency change was only 0.5%.",

author = "Abdelli Hamza and Takashiro Tsukamoto and Shuji Tanaka",

note = "Funding Information: This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). MJK (MEXT No.160187) would like to acknowledge the Japanese Ministry of Education, Science, Sports and Culture (MEXT).; 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 ; Conference date: 23-03-2020 Through 26-03-2020",

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