Qualitative analysis of a diamondlike carbon film by angle-resolved x-ray photoelectron spectroscopy

Susumu Takabayashi, Kunihiko Motomitsu, Takayuki Takahagi, Akira Terayama, Keishi Okamoto, Tatsuyuki Nakatani

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34 Citations (Scopus)


Angle-resolved x-ray photoelectron spectroscopy was used to investigate the surface of a diamondlike carbon film prepared by the ionized deposition method. We then analyzed the C 1s spectra using the Doniach-Šunjić (DŠ) [J. Phys. C 3, 285 (1970)] function convoluted with a Gaussian function. Consequently, we obtained four fitting curves for the carbon components in each spectrum, regardless of the assumption of the singularity index (α) in the DŠ function, which expresses the asymmetry of the C 1s spectrum. The curves were assigned in the order of binding energy to bulk s p3 carbon (283.7-283.8 eV), bulk s p2 carbon (284.2-284.3 eV), surface s p2 carbon (284.7-284.8 eV), and surface s p3 (285.3-285.4 eV) carbon. We further considered the influence of the assumption of α. Consequently, we suggest that the C 1s spectra can be quantitatively analyzed without considering the influences of α when the ratio of α for s p2 carbon to that for s p3 carbon [α (s p2): α (s p3)] is between 10:0 and 5:5. The distribution in the α ratio may indicate that the s p2 and the s p3 carbon atoms can interact with each other (hybridization) and differ from those highly oriented pyrolytic graphite and diamond, respectively.

Original languageEnglish
Article number103542
JournalJournal of Applied Physics
Issue number10
Publication statusPublished - 2007 Jun 11

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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