TY - GEN
T1 - Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam
AU - Chen, Jianlin
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
PY - 2019/4
Y1 - 2019/4
N2 - This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.
AB - This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.
KW - MEMS gyroscope
KW - focus ion beam (FIB) trimming
KW - mode matching
UR - http://www.scopus.com/inward/record.url?scp=85068603058&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85068603058&partnerID=8YFLogxK
U2 - 10.1109/ISISS.2019.8739610
DO - 10.1109/ISISS.2019.8739610
M3 - Conference contribution
AN - SCOPUS:85068603058
T3 - INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019
Y2 - 1 April 2019 through 5 April 2019
ER -