Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Jianlin Chen; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1109/ISISS.2019.8739610

Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.

Original language	English
Title of host publication	INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538678275
DOIs	https://doi.org/10.1109/ISISS.2019.8739610
Publication status	Published - 2019 Apr
Event	6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019 - Naples, United States Duration: 2019 Apr 1 → 2019 Apr 5

Publication series

Name	INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference	6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019
Country	United States
City	Naples
Period	19/4/1 → 19/4/5

Keywords

MEMS gyroscope
focus ion beam (FIB) trimming
mode matching

ASJC Scopus subject areas

Control and Optimization
Instrumentation

Access to Document

10.1109/ISISS.2019.8739610

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Cite this

Chen, J., Tsukamoto, T., & Tanaka, S. (2019). Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. In INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings [8739610] (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2019.8739610

Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. / Chen, Jianlin; Tsukamoto, Takashiro ; Tanaka, Shuji.

INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8739610 (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, J, Tsukamoto, T & Tanaka, S 2019, Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. in INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings., 8739610, INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings, Institute of Electrical and Electronics Engineers Inc., 6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019, Naples, United States, 19/4/1. https://doi.org/10.1109/ISISS.2019.8739610

Chen J, Tsukamoto T , Tanaka S. Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. In INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8739610. (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). https://doi.org/10.1109/ISISS.2019.8739610

Chen, Jianlin ; Tsukamoto, Takashiro ; Tanaka, Shuji. / Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

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abstract = "This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.",

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