Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.

Original languageEnglish
Title of host publicationINERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538678275
DOIs
Publication statusPublished - 2019 Apr
Event6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019 - Naples, United States
Duration: 2019 Apr 12019 Apr 5

Publication series

NameINERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019
CountryUnited States
CityNaples
Period19/4/119/4/5

Keywords

  • MEMS gyroscope
  • focus ion beam (FIB) trimming
  • mode matching

ASJC Scopus subject areas

  • Control and Optimization
  • Instrumentation

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