Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Jianlin Chen; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1109/ISISS.2019.8739610

Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Citations (Scopus)

Abstract

This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.

Original language	English
Title of host publication	INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538678275
DOIs	https://doi.org/10.1109/ISISS.2019.8739610
Publication status	Published - 2019 Apr
Event	6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019 - Naples, United States Duration: 2019 Apr 1 → 2019 Apr 5

Publication series

Name	INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference	6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019
Country/Territory	United States
City	Naples
Period	19/4/1 → 19/4/5

Keywords

MEMS gyroscope
focus ion beam (FIB) trimming
mode matching

ASJC Scopus subject areas

Control and Optimization
Instrumentation

Access to Document

10.1109/ISISS.2019.8739610

Cite this

Chen, J., Tsukamoto, T., & Tanaka, S. (2019). Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. In INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings [8739610] (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2019.8739610

Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. / Chen, Jianlin; Tsukamoto, Takashiro ; Tanaka, Shuji.

INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8739610 (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, J, Tsukamoto, T & Tanaka, S 2019, Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. in INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings., 8739610, INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings, Institute of Electrical and Electronics Engineers Inc., 6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019, Naples, United States, 19/4/1. https://doi.org/10.1109/ISISS.2019.8739610

Chen J, Tsukamoto T , Tanaka S. Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. In INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8739610. (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). https://doi.org/10.1109/ISISS.2019.8739610

Chen, Jianlin ; Tsukamoto, Takashiro ; Tanaka, Shuji. / Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam. INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

@inproceedings{7d95b872f1b54b6d929b992ed1b5e5a6,

title = "Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam",

abstract = "This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.",

keywords = "MEMS gyroscope, focus ion beam (FIB) trimming, mode matching",

author = "Jianlin Chen and Takashiro Tsukamoto and Shuji Tanaka",

year = "2019",

month = apr,

doi = "10.1109/ISISS.2019.8739610",

language = "English",

series = "INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",

note = "6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019 ; Conference date: 01-04-2019 Through 05-04-2019",

}

TY - GEN

T1 - Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

AU - Chen, Jianlin

AU - Tsukamoto, Takashiro

AU - Tanaka, Shuji

PY - 2019/4

Y1 - 2019/4

N2 - This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.

AB - This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.

KW - MEMS gyroscope

KW - focus ion beam (FIB) trimming

KW - mode matching

UR - http://www.scopus.com/inward/record.url?scp=85068603058&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85068603058&partnerID=8YFLogxK

U2 - 10.1109/ISISS.2019.8739610

DO - 10.1109/ISISS.2019.8739610

M3 - Conference contribution

AN - SCOPUS:85068603058

T3 - INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

BT - INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 6th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2019

Y2 - 1 April 2019 through 5 April 2019

ER -

Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

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