TY - GEN
T1 - Q-enhancement with electrode materials in the FBAR for timing devices
AU - Hara, Motoaki
AU - Kuwano, Hiroki
PY - 2014/10/20
Y1 - 2014/10/20
N2 - Thin film bulk acoustic resonators (FBARs) are key components in the timing devices such as FBAR-based voltage controlled oscillators (VCOs) or wake-up-circuits for wireless sensor nodes. For such applications, theoretical analysis of Q-factor is crucial rather than that of the effective electro-mechanical coupling coefficient keff2. We developed the batch calculation program based on Mason's model in this study. Since the physical model in our program was not constrained by the element size against the finite element method (FEM), resonant frequency and characteristic impedance, which strongly affect the Q-factor, can be easily kept a constant in the calculation models. Thus, their influences for the Q-factor can be cancelled. It was clarified how Q-factor is controlled by the electrode design.
AB - Thin film bulk acoustic resonators (FBARs) are key components in the timing devices such as FBAR-based voltage controlled oscillators (VCOs) or wake-up-circuits for wireless sensor nodes. For such applications, theoretical analysis of Q-factor is crucial rather than that of the effective electro-mechanical coupling coefficient keff2. We developed the batch calculation program based on Mason's model in this study. Since the physical model in our program was not constrained by the element size against the finite element method (FEM), resonant frequency and characteristic impedance, which strongly affect the Q-factor, can be easily kept a constant in the calculation models. Thus, their influences for the Q-factor can be cancelled. It was clarified how Q-factor is controlled by the electrode design.
KW - FBAR
KW - Mason's model
KW - timing device
UR - http://www.scopus.com/inward/record.url?scp=84910049314&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84910049314&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2014.0504
DO - 10.1109/ULTSYM.2014.0504
M3 - Conference contribution
AN - SCOPUS:84910049314
T3 - IEEE International Ultrasonics Symposium, IUS
SP - 2023
EP - 2026
BT - IEEE International Ultrasonics Symposium, IUS
PB - IEEE Computer Society
T2 - 2014 IEEE International Ultrasonics Symposium, IUS 2014
Y2 - 3 September 2014 through 6 September 2014
ER -