Q-enhancement with electrode materials in the FBAR for timing devices

Motoaki Hara, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Thin film bulk acoustic resonators (FBARs) are key components in the timing devices such as FBAR-based voltage controlled oscillators (VCOs) or wake-up-circuits for wireless sensor nodes. For such applications, theoretical analysis of Q-factor is crucial rather than that of the effective electro-mechanical coupling coefficient keff2. We developed the batch calculation program based on Mason's model in this study. Since the physical model in our program was not constrained by the element size against the finite element method (FEM), resonant frequency and characteristic impedance, which strongly affect the Q-factor, can be easily kept a constant in the calculation models. Thus, their influences for the Q-factor can be cancelled. It was clarified how Q-factor is controlled by the electrode design.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages2023-2026
Number of pages4
ISBN (Electronic)9781479970490
DOIs
Publication statusPublished - 2014 Oct 20
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 2014 Sep 32014 Sep 6

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period14/9/314/9/6

Keywords

  • FBAR
  • Mason's model
  • timing device

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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