@inproceedings{83d44f5461e04ab5b82939e23238369c,
title = "PZT MEMS Speaker Integrated with Silicon-Parylene Composite Corrugated Diaphragm",
abstract = "We have developed a true MEMS speaker with a Si-parylene composite diaphragm and a PZT actuator. The composite diaphragm is a closed form preventing air leakage and highly deformable by 10 m thick parylene corrugation. The PZT actuator is composed of high quality 5 m thick PZT with rated driving voltage higher than 50 V. The composite diaphragm and the PZT actuator were stacked and bonded. In the ear ulator environment, SPL (sound pressure level) higher than 120 dB was achieved at 4.2 kHz by applying 15 Vpp. And a flat SPL of in the region of 85 dB was generated between 200 Hz and 2 kHz by applying 5 Vpp. THD (total harmonic distortion) is almost smaller than 5% at a driving voltage of 5 Vpp. ",
keywords = "In ear measurement, MEMS speaker, PZT actuator, SPL, THD, corrugation, parylene C",
author = "Yuki Hirano and Yukio Suzuki and Norihito Fujita and Li, {Chung Min} and Hirofumi Chiba and Shuji Tanaka",
note = "Funding Information: This research was supported by STANLEY ELECTRIC CO., LTD. provided the PZT deposition and process technology. And This research was also supported by AAC Technologies PTE., LTD. provided the acoustic technology and method of setting up the acoustic environment. Processing was done at the Micro/Nano-Machining Research and Education Center and the Nishizawa Center. Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
doi = "10.1109/MEMS51670.2022.9699539",
language = "English",
series = "IEEE Symposium on Mass Storage Systems and Technologies",
publisher = "IEEE Computer Society",
pages = "255--258",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
}