PZT MEMS Actuator with Integrated Buried Piezoresistors for Position Control

Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have monolithically integrated a PZT thin film and buried Si piezoresistive sensors for piezoelectric MEMS actuators. The PZT thin film works as a sensor as well as an actuator, but the static position sensing is difficult unlike piezoresistors. On the other hand, the process compatibility of PZT with a Si piezoresistor is unclear, because the Si piezoresistor is very sensitive to impurities, surface charges and contaminations. In this study, PZT MEMS cantilevers with the buried Si piezoresistive sensors were successfully fabricated by a proposed fabrication process, and the material composition was analyzed by secondary ion mass spectrometry (SIMS) to study the process compatibility. The fabricated devices were actuated by the PZT thin film, showing the first resonance frequency at 6.3 kHz. The integrated position sensor could successfully detect the amplitude with a sensitivity, non-linearity and noise floor of 0.037 mV/pm, 0.75% and 1 × 10 V/√Hz, respectively.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages626-629
Number of pages4
ISBN (Electronic)9781665419123
DOIs
Publication statusPublished - 2021 Jan 25
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 2021 Jan 252021 Jan 29

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
CountryUnited States
CityVirtual, Gainesville
Period21/1/2521/1/29

Keywords

  • Buried piezoresistor
  • Monolithic integration
  • Piezoelectric actuator
  • PZT thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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