Novel piezo-driven XYZ and XY microstages have been developed. The design, fabrication and evaluation of the two kinds of microstages are presented. One of the microstages is fabricated from a monolithic PZT plate. Using dicing, electroplating of nickel, photolithography and laser machining, stacked PZT actuators are formed in the PZT plate, also the structure of XYZ microstage with 16×15 mm 2 are defined. This microstage has a capability of 6 degrees of freedom in motion. Using capacitive displacement sensor, precise motion control is demonstrated. However, it is difficult to form support spring with a low stiffness due to the difficulty in the structure formation of PZT. Another type of the microstage is hybrid of Si and PZT, a Si XY microstage structure is formed by deep reactive ion etching, and PZT stacked actuators are assembled in to the Si microstage. In order to amplify the displacements, Moonie amplification mechanism is chosen. The stage is supported by the Moonie mechanism and support springs. Over 80 μm of displacement is obtained at an application voltage of 70 V, also 18 times amplitude amplification is demonstrated.
ASJC Scopus subject areas