Pyrolysis of dimethylhydrazine for the MOVPE growth of GaN and InN monitored by in-situ quadrupole mass spectrometry

Quang Tu Thieu, Takuro Inamoto, Shigeyuki Kuboya, Kentaro Onabe

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The pyrolysis of dimethylhydrazine (DMHy) which is used as an alternative for ammonia in the MOVPE growth of nitrides has been investigated in a horizontal LP-MOVPE reactor using quadrupole mass spectrometry. The thermal decomposition rate is investigated with regard to the dependence on reactor pressure, gas flow rate and sampling position over the susceptor. The temperature for 50% decomposition is 400-600 °C, which increases with lowering the pressure irrespective of the carrier gases. The results imply a strong dependence of pyrolysis rate on the pressure, namely higher pressures induce more efficient decomposition of DMHy

Original languageEnglish
Pages (from-to)405-408
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume10
Issue number3
DOIs
Publication statusPublished - 2013 Mar 1
Externally publishedYes

Keywords

  • Dimethylhydrazine
  • MOVPE
  • Mass spectrometry
  • Nitrides

ASJC Scopus subject areas

  • Condensed Matter Physics

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