PVDF - TrFE/SiO 2 Composite Film Bulk Acoustic Resonator for Frequency-Modulated Sensor Application

Ryosuke Kaneko, Joerg Froemel, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


This paper reports a film bulk acoustic resonator (FBAR) using polyvinylidene fluoride- trifluoroethylene (PVDF-TrFE)/SiO2 composite for frequency-modulated sensing. The PVDF-TrFE/SiO2 composite FBAR was designed, simulated and developed. A Micro Electro Mechanical Systems (MEMS) process was adopted for PVDF-TrFE, including xenon difluoride (XeF2) release etching. After poling PVDF - TrFE, the thickness expansion mode was observed at 387-398 MHz. A modified Butterworth-Van Dyke (MBVD) model for a lossy piezoelectric transducer was used for the characterization of the thickness expansion mode. Impedance ratio, coupling coefficient (k^{2}) and mechanical quality factor (Q-{m}) increase with the radius of the device. The temperature coefficient of frequency is as large as -1430 ppm/°C due to decrease in the elastic constants of PVDF-TrFE. The maximum (Q-{m}) is 33 for 80 um radius of the device at 20°C, decreasing with temperature raise. Allan variance is 1.15 kHz (i.e. 2.96 ppm) at an averaging time of 1.01 s. These results are important for future sensing using the FBAR.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Other2018 IEEE International Ultrasonics Symposium, IUS 2018


  • Film bulk acoustic resonator
  • Frequency Stability
  • MBVD model
  • PVDF-TrFE/Si02 composite
  • Temperature dependency
  • Thickness expansion mode

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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